Author Affiliations
Abstract
1 Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2 Graduate School of the Chinese Academy of Sciences, Beijing 100039
An improved method of angle measurement is proposed based on a parallel plate interferometer. A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection angle measurement. A reflecting mirror is introduced for increasing the measurement resolution. In experiments, a deflection angle of a measured target was measured within about 3 deg. with high accuracy. And as a phase modulating interferometer, it was used to measure a small angular displacement with a repeatability of 5.5*10^(-8) rad.
角度测量 干涉仪 平行平板 PSD位置探测 120.3180 Interferometry 120.4640 Optical instruments 120.0120 Instrumentation, measurement, and metrology Chinese Optics Letters
2007, 5(7): 403
Author Affiliations
Abstract
1 Information Optics Laboratory, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2 Graduate School of the Chinese Academy of Sciences, Beijing 100039
A new quality map for quality-guided phase unwrapping is presented. The quality map is derived from the wrapped phase map directly and can reflect phase quality accurately. It is demonstrated that the proposed quality map is a good phase-quality indicator, with which the quality-guided unwrapping algorithm can retrieve a reliable phase profile.
100.0100 image processing 120.5050 phase measurement 070.5010 pattern recognition and feature extraction Chinese Optics Letters
2004, 2(12): 12698